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In this study, we successfully microfabricated high-aspect-ratio carbon posts (9.4:1) pyrolyze negative photoresists in an oxygen-free environment we often found that [10] Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. International Standard Book Number (eBook - PDF) I dedicate this third edition of Fundamentals of Microfabrication to my family in the . Request PDF on ResearchGate | Fundamentals of Microfabrication: The Science of Miniaturization, Second…

Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor…

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